Surface cleaning using an argon or nitrogen aerosol WT McDermott, RC Ockovic, JJ Wu, DW Cooper, A Schwarz, HL Wolfe US Patent 5,294,261, 1994 | 298* | 1994 |
Production of ultrafine metal oxide aerosol particles by thermal decomposition of metal alkoxide vapors K Okuyama, Y Kousaka, N Tohge, S Yamamoto, JJ Wu, RC Flagan, ... AIChE Journal 32 (12), 2010-2019, 1986 | 288 | 1986 |
Surface cleaning using a cryogenic aerosol WT McDermott, RC Ockovic, JJ Wu, DW Cooper, A Schwarz, HL Wolfe US Patent 5,062,898, 1991 | 220 | 1991 |
Surface cleaning using a cryogenic aerosol WT McDermott, RC Ockovic, JJ Wu, DW Cooper, A Schwarz, HL Wolfe US Patent 5,062,898, 1991 | 220 | 1991 |
Insitu plasma contamination measurements by HeNe laser light scattering: A case study GS Selwyn, JS McKillop, KL Haller, JJ Wu Journal of Vacuum Science & Technology A 8 (3), 1726-1731, 1990 | 207 | 1990 |
A discrete-sectional solution to the aerosol dynamic equation JJ Wu, RC Flagan Journal of colloid and Interface Science 123 (2), 339-352, 1988 | 199 | 1988 |
Apparatus to clean solid surfaces using a cryogenic aerosol WT Mcdermott, JJ Wu, RC Ockovic EP Patent 0,569,708, 2003 | 197* | 2003 |
Apparatus to clean solid surfaces using a cryogenic aerosol WT McDermott, JJ Wu, RC Ockovic US Patent 5,209,028, 1993 | 197 | 1993 |
Residue removal by supercritical fluids KJ McCullough, RJ Purtell, LB Rothman, JJ Wu US Patent 5,908,510, 1999 | 149 | 1999 |
Residue removal by supercritical fluids KJ Mccullough, RJ Purtell, LB Rothman, J WU EP Patent 0,836,895, 1998 | 149 | 1998 |
Residue removal by supercritical fluids KJ Mccullough, RJ Purtell, LB Rothman, JJ Wu EP Patent App. 19,970,307,272, 1997 | 149 | 1997 |
Removal of fluorine or chlorine residue by liquid CO 2 KJ Mccullough, RJ Purtell, LB Rothman, J Wu | 117 | 1999 |
Removal of fluorine or chlorine residue by liquid CO. sub. 2 KJ McCullough, RJ Purtell, LB Rothman, JJ Wu US Patent 5,976,264, 1999 | 117 | 1999 |
Measurements of charge on submicron particles generated in a sputtering process JJ Wu, RJ Miller Journal of Applied Physics 67 (2), 1051-1054, 1990 | 78 | 1990 |
Onset of runaway nucleation in aerosol reactors JJ Wu, RC Flagan Journal of applied physics 61 (4), 1365-1371, 1987 | 75 | 1987 |
Process for fabricating a semiconductor structure having sidewalls GG Gifford, YJT Lii, JJ Wu US Patent 5,378,312, 1995 | 72 | 1995 |
A method for the synthesis of submicron particles JJ Wu, HV Nguyen, RC Flagan Langmuir 3 (2), 266-271, 1987 | 64 | 1987 |
Experimental control of ultrafine TiO< sub> 2</sub> particle generation from thermal decomposition of titanium tetraisopropoxide vapor K Okuyama, JT Jeung, Y Kousaka, HV Nguyen, JJ Wu, RC Flagan Chemical engineering science 44 (6), 1369-1375, 1989 | 58 | 1989 |
Evaluation and control of particle properties in aerosol reactors JJ Wu, HV Nguyen, RC Flagan, K Okuyama, Y Kousaka AIChE journal 34 (8), 1249-1256, 1988 | 46 | 1988 |
Deposition of submicron aerosol particles during integrated circuit manufacturing: theory DW COOPER, RJ MILLER, JINJ WU, MH PETERS Particulate science and technology 8 (3-4), 209-224, 1990 | 44 | 1990 |