ESD on-wafer characterization: Is TLP still the right measurement tool? M Scholz, D Linten, S Thijs, S Sangameswaran, M Sawada, T Nakaei, ... IEEE Transactions on Instrumentation and Measurement 58 (10), 3418-3426, 2009 | 34 | 2009 |
ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors S Sangameswaran, J De Coster, D Linten, M Scholz, S Thijs, ... EOS/ESD 2008-2008 30th Electrical Overstress/Electrostatic Discharge …, 2008 | 22 | 2008 |
Investigating ESD sensitivity in electrostatic SiGe MEMS S Sangameswaran, J De Coster, D Linten, M Scholz, S Thijs, ... Journal of Micromechanics and Microengineering 20 (5), 055005, 2010 | 12 | 2010 |
A study of breakdown mechanisms in electrostatic actuators using mechanical response under EOS-ESD stress S Sangameswaran, J De Coster, M Scholz, D Linten, S Thijs, C Van Hoof, ... 2009 31st EOS/ESD Symposium, 1-8, 2009 | 10 | 2009 |
Behavior of RF MEMS switches under ESD stress S Sangameswaran, J De Coster, V Cherman, P Czarnecki, D Linten, ... Electrical Overstress/Electrostatic Discharge Symposium Proceedings 2010, 1-8, 2010 | 9 | 2010 |
SiGe MEMS at processing temperatures below 250° C J El-Rifai, S Sedky, R Van Hoof, S Severi, D Lin, S Sangameswaran, ... Sensors and Actuators A: Physical 188, 230-239, 2012 | 7 | 2012 |
Reliability of RF MEMS I De Wolf, P Czarnecki, J De Coster, OV Pedreira, X Rottenberg, ... Handbook of Mems for Wireless and Mobile Applications, 291-342, 2013 | 5 | 2013 |
Reliability test methodology for MEMS and MOEMS under electrical overstress and electrostatic discharge stress S Sangameswaran, J De Coster, G Groeseneken, I De Wolf Journal of Micro/Nanolithography, MEMS, and MOEMS 11 (2), 021204-021204, 2012 | 4 | 2012 |
Impact of design factors and environment on the ESD sensitivity of MEMS micromirrors S Sangameswaran, J De Coster, G Groeseneken, I De Wolf Microelectronics Reliability 50 (9-11), 1383-1387, 2010 | 4 | 2010 |
Robustness of electrostatic MEMS actuators against electrical overstress J De Coster, X Rottenberg, S Sangameswaran, P Ekkels, HAC Tilmans, ... TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 4 | 2009 |
A SCR-based ESD protection for MEMS—Merits and challenges S Sangameswaran, S Thijs, M Scholz, J De Coster, D Linten, ... EOS/ESD Symposium Proceedings, 1-10, 2011 | 3 | 2011 |
Applications of laser-Doppler vibrometry during MEMS device qualification J De Coster, S Sangameswaran, I De Wolf | 2 | 2010 |
Mechanical response of electrostatic actuators under ESD stress S Sangameswaran, J De Coster, D Linten, M Scholz, S Thijs, C Van Hoof, ... TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009 | 2 | 2009 |
ESD issues in MEMS: a case study in micromirrors S Sangameswaran, J De Coster, D Linten, M Scholz, S Thijs, ... | 2 | 2008 |
Design and fabrication of SiGe MEMS structures with high intrinsic ESD robustness S Sangameswaran, V Cherman, J De Coster, A Witvrouw, ... 2012 IEEE International Reliability Physics Symposium (IRPS), 3E. 4.1-3E. 4.6, 2012 | 1 | 2012 |
A Detailed Study of a Novel Wafer Separation Method for Surface Sensitive MEMS Wafers K Malachowski, S Severi, R Van Hoof, S Sangameswaran, S Genda, ... MRS Online Proceedings Library (OPL) 1415, mrsf11-1415-tt01-05, 2012 | 1 | 2012 |
An integrated measurement set-up to study the impact of atmosphere on ESD in MEMS S Sangameswaran, J De Coster, V Cherman, D Linten, M Scholz, S Thijs, ... | 1 | 2010 |
Electronic packaging challenges for emerging devices S Sangameswaran, M De Samber 2012 International Conference on Emerging Electronics, 1-2, 2012 | | 2012 |
Electrostatic Discharge (ESD) in Microelectromechanical Systems (MEMS): Sensitivity and Protection S Sangameswaran | | 2011 |
A silicon-controlled rectifier-based ESD protection for MEMS–Merits and challenges S Sangameswaran, S Thijs, M Scholz, J De Coster, D Linten, ... Proceedings 33rd Annual EOS/ESD Symposium, 2011 | | 2011 |